Three-dimensional imaging using coherent x rays at grazing incidence geometry

We have developed a 3 dimensional Coherent Diffraction Imaging (CDI) algorithm to retrieve phases of diffraction patterns samples in Grazing Incidence Small Angle X-ray Scattering (GISAXS) experiments. The interprets the using Distorted-Wave Born Approximation (DWBA) instead (BA), as this case existence reflected beam from substrate causes pattern deviate significantly simple Fourier transform object. Detailed computer simulations show that works. Verification with real experiments is planned.